Hummer 6.2 Sputter Coater Plasma Mode Operating Instructions:
 | Name : Hummer 6.2 Sputter Coater Plasma Mode Operating Instructions: File Type : Size : 75 KB |
Hummer 6.2 Sputter Coater Plasma Mode Operating Instructions: Note: this does not take the place of reading the manual a Chamber Figure 1: Sputtering Chamber and Control Panel Control Panel Open here b Place Samples Here Fine Gas Control Valve c Pressure Meter Auto timer control Manual/Auto Switch Voltage Selector Mode Switch Voltage Switch Power Switch Pulse Switch Gas Switch Part 3: Plasma Processing 1. 2. 3. 4. Turn off power to the sputter coater, if necessary. Open the sputtering chamber, and install the aluminum etch ring if you will be etching for more than 2 minutes. Put your samples on the stage, replace glass, and close the sputter chamber. Set controls to the following: Control Main Power Voltage Switch Voltage Selector Gas Switch Manual/Auto Switch Pulse Switch Mode Switch 5. 6. 7. 8. 9. Setting Off Off 0 Off Manual Off Plasma Turn on main power Let the vacuum reach about 20 mtorr. Set the regulator on the argon gas tank in the corner of the room Ebook Relate: switch ebook manual ebook control ebook power ebook plasma ebook auto switch ebook main power ebook pulse switch ebook manual auto ebook manual auto switch ebook vacuum reach about ebook switch voltage selector ebook |
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